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发明名称
Piezo actuator comprising a stack of hollow bodies
摘要
申请公布号
EP1076367(A3)
申请公布日期
2004.01.07
申请号
EP20000117140
申请日期
2000.08.10
申请人
ROBERT BOSCH GMBH
发明人
BOECKING, FRIEDRICH
分类号
H01L41/083;H02N2/04;(IPC1-7):H01L41/083;H01L41/047;H01L41/09;H01L41/24
主分类号
H01L41/083
代理机构
代理人
主权项
地址
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