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发明名称
Method and apparatus for cooling a workpiece using an electrostatic chuck
摘要
申请公布号
EP0827187(A3)
申请公布日期
2004.01.07
申请号
EP19970306500
申请日期
1997.08.26
申请人
APPLIED MATERIALS, INC.
发明人
PARKHE, VIJAY D.
分类号
H01L21/683;H02N13/00;(IPC1-7):H01L21/00;H01L21/68
主分类号
H01L21/683
代理机构
代理人
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