METHOD OF WET ETCHING AN INORGANIC ANTIREFLECTION LAYER,申请号KR20027017740-传众专利搜索

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发明名称	METHOD OF WET ETCHING AN INORGANIC ANTIREFLECTION LAYER
摘要
申请公布号	KR20040002406(A)	申请公布日期	2004.01.07
申请号	KR20027017740	申请日期	2002.12.26
申请人		发明人
分类号	C23F1/24;H01L21/027;C09K13/04;C09K13/08;G03F7/09;H01L21/00;H01L21/28;H01L21/306;H01L21/3065;H01L21/311;H01L21/3213;H01L29/423;H01L29/49;H01L29/78	主分类号	C23F1/24
代理机构		代理人
主权项
地址

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