发明名称 CAPACITOR OF SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A capacitor of a semiconductor device and a method for manufacturing the same are provided to prevent short due to hemispherical polysilicon crystal by forming selectively the hemispherical polysilicon crystal at a cylindrical lower electrode having different area. CONSTITUTION: A capacitor comprises the first lower electrode(108), the second lower electrode(109), a dielectric film, and an upper electrode. At this time, the first lower electrode(108) is relatively wider area compared to the second lower electrode(109). Therefore, a hemispherical polysilicon crystal(110) is formed on inner portions of the first lower electrode(108) and formed on entire surface of the second lower electrode(109).
申请公布号 KR20040001193(A) 申请公布日期 2004.01.07
申请号 KR20020036324 申请日期 2002.06.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, JEONG HO
分类号 H01L27/108;(IPC1-7):H01L27/108 主分类号 H01L27/108
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