| 发明名称 |
Device for adjusting objects and travel ranges |
| 摘要 |
The adjustment device has a base part (2) and a relatively spaced head part (3) held apart by at least one adjustment mechanism (8), having side sections (10,11) with a relative spacing or angle adjusted via a length setting device. |
| 申请公布号 |
EP1245983(A3) |
申请公布日期 |
2004.01.07 |
| 申请号 |
EP20020006747 |
申请日期 |
2002.03.23 |
| 申请人 |
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG |
发明人 |
KLEIN, KLAUS-DIETER;PETASCH, THOMAS;MUENKER, HARTMUT |
| 分类号 |
F16M7/00;F16B1/00;F16B5/02;G02B7/02;G05G23/00;H01L21/027 |
主分类号 |
F16M7/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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