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经营范围
发明名称
METHODS FOR PREPARING RUTHENIUM METAL FILMS
摘要
申请公布号
EP1115900(B1)
申请公布日期
2004.01.07
申请号
EP19990942116
申请日期
1999.08.11
申请人
MICRON TECHNOLOGY, INC.
发明人
VAARTSTRA, BRIAN, A.;MARSH, EUGENE, P.
分类号
C23C16/18;H01L21/02;H01L21/28;H01L21/285;H01L21/8246;H01L27/105;(IPC1-7):C23C16/18
主分类号
C23C16/18
代理机构
代理人
主权项
地址
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