发明名称 DIELECTRIC HAVING BARRIER EFFECT TO COPPER DIFFUSION
摘要 <p>PURPOSE: A poly-o-hydroxyamide, a polybenzoxazole obtained from the poly-o-hydroxyamide, an electronic component containing a dielectric including the polybenzoxazole, and their preparation methods are provided, to obtain a polybenzoxazole having an excellent barrier effect to the diffusion of copper. CONSTITUTION: The poly-o-hydroxyamide is represented by the formula 1, wherein a is 0 or 1; b is an integer of 1-200; c is an integer of 0-200; and d is 0 or 1. The poly-o-hydroxyamide is prepared by reacting at least one monomer represented by the formula 2 with at least one dicarboxylic acid or an activated dicarboxylic derivative represented by the formula 3, wherein Z is Z1, Z2 or Z3; L is a hydroxyl group or an activated group; and Y is Y1, Y2 or Y3. Preferably the reaction is carried out in the presence of a base. The polybenzoxazole is prepared by heating the poly-o-hydroxyamide.</p>
申请公布号 KR20040002741(A) 申请公布日期 2004.01.07
申请号 KR20030041909 申请日期 2003.06.26
申请人 INFINEON TECHNOLOGIES AG. 发明人 SEZI RECAI;WALTER ANDREAS;MALTENBERGER ANNA;LOWACK KLAUS
分类号 C08G73/02;C08G69/26;C08G69/32;C08G73/22;H01B3/30;H01B3/44;H01L21/312;H01L21/768;H01L23/522;(IPC1-7):C08G73/02 主分类号 C08G73/02
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