| 发明名称 |
DETACHABLE SUBSTRATE WITH CONTROLLED MECHANICAL HOLD AND METHOD FOR PRODUCTION THEREOF |
| 摘要 |
<p>The invention relates to a method for production of a detachable substrate, comprising a method step for the production of an interface by means of fixing, using molecular adhesion, one face of a layer on one face of a substrate, in which, before fixing, a treatment stage for at least one of said faces is provided, rendering the mechanical hold at the interface at such a controlled level to be compatible with a subsequent detachment.</p> |
| 申请公布号 |
EP1378004(A2) |
申请公布日期 |
2004.01.07 |
| 申请号 |
EP20020732807 |
申请日期 |
2002.04.11 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
ASPAR, BERNARD;MORICEAU, HUBERT;RAYSSAC, OLIVIER;GHYSELEN, BRUNO |
| 分类号 |
B81C99/00;H01L21/02;H01L21/762;H01L27/12;(IPC1-7):H01L21/20;B23B31/00;H01L21/78;H01L21/265;H01L21/304;H01L21/68;H01L21/306 |
主分类号 |
B81C99/00 |
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