| 发明名称 |
Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members |
| 摘要 |
A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa. |
| 申请公布号 |
EP1158072(A3) |
申请公布日期 |
2004.01.07 |
| 申请号 |
EP20010303504 |
申请日期 |
2001.04.17 |
| 申请人 |
NGK INSULATORS, LTD. |
发明人 |
YAMADA, HIROTAKE;KATSUDA, YUJI;OHASHI, TSUNEAKI;MASUDA, MASAAKI;HARADA, MASASHI;IWASAKI, HIROYUKI;ITO, SHIGENORI |
| 分类号 |
B32B18/00;C04B41/50;C04B41/52;C04B41/87;C04B41/89;C23C4/00;C23C4/18;C23C16/40;C23C16/44;C23C24/08;C23C26/00;C23C30/00 |
主分类号 |
B32B18/00 |
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