Plasma processing system and protective member used for the same,申请号EP19970302744-传众专利搜索

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发明名称	Plasma processing system and protective member used for the same
摘要
申请公布号	EP0803896(B1)	申请公布日期	2004.01.07
申请号	EP19970302744	申请日期	1997.04.22
申请人	NISSHINBO INDUSTRIES INC.	发明人	SAITO, KAZUO;MOCHIZUKI, YASUSHI
分类号	C23C16/44;C23C16/458;C23C16/50;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32	主分类号	C23C16/44
代理机构		代理人
主权项
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