发明名称 SEMICONDUCTOR DEVICE FOR RESTRAINING JUNCTION LEAKAGE AND MANUFACTURING METHOD THEREFOR
摘要 PURPOSE: A semiconductor device for restraining junction leakage and a manufacturing method therefor are provided to restrain junction leakage generated at edges of an active region and to improve sheet resistance. CONSTITUTION: A silicon substrate(10) is defined to an active and inactive region, and a trench is formed at the inactive region. A field insulating layer(12) is filled into the trench, wherein a top edge portion(12A) of the field insulating layer is protruded into the upper of the silicon substrate located edges of the active region. A source/drain region(20) is formed in the substrate. A metal silicide layer(22) is formed on the source/drain region except for the edges of the active region.
申请公布号 KR20040001907(A) 申请公布日期 2004.01.07
申请号 KR20020037241 申请日期 2002.06.29
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, GI MIN
分类号 H01L21/336;(IPC1-7):H01L21/336 主分类号 H01L21/336
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