发明名称 CORNER CUBE ARRAY AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A corner cube array and a fabricating method thereof are provided to be minute and have high accuracy. CONSTITUTION: A substrate(1) has its surface part made of a cubic crystal material. The substrate has a surface substantially parallel to a plane of the crystal material. The substrate surface is patterned to form a certain pattern on the substrate surface in a plurality of cubic elements. Each of the cubic elements is formed by a plurality of recesses, a plurality of protrusions and the combination of the recesses and the protrusions. The first active species including elements included in the crystal material are supplied on the substrate in which the cubic elements are formed.
申请公布号 KR20040002732(A) 申请公布日期 2004.01.07
申请号 KR20030041867 申请日期 2003.06.26
申请人 SHARP CORPORATION 发明人 IHARA ICHIRO;MINOURA KIYOSHI
分类号 G02B5/122;G02B1/02;G02B5/124;G02F1/1335;(IPC1-7):G02F1/133 主分类号 G02B5/122
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