发明名称 |
CORNER CUBE ARRAY AND FABRICATING METHOD THEREOF |
摘要 |
PURPOSE: A corner cube array and a fabricating method thereof are provided to be minute and have high accuracy. CONSTITUTION: A substrate(1) has its surface part made of a cubic crystal material. The substrate has a surface substantially parallel to a plane of the crystal material. The substrate surface is patterned to form a certain pattern on the substrate surface in a plurality of cubic elements. Each of the cubic elements is formed by a plurality of recesses, a plurality of protrusions and the combination of the recesses and the protrusions. The first active species including elements included in the crystal material are supplied on the substrate in which the cubic elements are formed. |
申请公布号 |
KR20040002732(A) |
申请公布日期 |
2004.01.07 |
申请号 |
KR20030041867 |
申请日期 |
2003.06.26 |
申请人 |
SHARP CORPORATION |
发明人 |
IHARA ICHIRO;MINOURA KIYOSHI |
分类号 |
G02B5/122;G02B1/02;G02B5/124;G02F1/1335;(IPC1-7):G02F1/133 |
主分类号 |
G02B5/122 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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