发明名称 BRIDGE FOR MICROELECTROMECHANICAL APPARATUS
摘要 PURPOSE: A bridge for a microelectromechanical apparatus is provided to isolate different structures electrically from one another to allow an electrical connection over an air gap and to enable isolation from underlying devices. CONSTITUTION: A conductive bridge(16) in a second conductive layer is utilized to join a pair of spaced apart conductive strips(12a,12b,12c) in a first conductive layer. A gap between the first and second strips is bridged by the bridge while isolating both the first and second strips and the bridge from another conductor, which extends through the gap between the first and second strips.
申请公布号 KR20040002553(A) 申请公布日期 2004.01.07
申请号 KR20030038244 申请日期 2003.06.13
申请人 INTEL CORP. 发明人 MA QING;CHOU TSUNG KUAN ALLEN
分类号 B81C1/00;B81B7/00;B81B7/02;H01L21/3205;H01L21/768;H01L21/822;H01L23/52;H01L23/522;H01L23/66;H01L27/04;(IPC1-7):B81B7/02 主分类号 B81C1/00
代理机构 代理人
主权项
地址