| 摘要 |
PURPOSE: An apparatus for forming chrome oxide passivation (COP) film on a stainless steel for semiconductor is provided to prevent pitting corrosion due to the gas and form uniformed chrome oxide passivation film by inducing distribution of constant current as controlling a gas generated by impressing electrolyte and power supply to the surface of semiconductor stainless steel using the electrolyte. CONSTITUTION: The apparatus(200) comprises an electrolytic cell(250) for containing electrolyte; jigs(230) for uniformly forming a chrome oxide passivation film on the product by positioning a product to be treated(234) and impressing electrolyte and power supply to the product so that the product is electrolytically reacted; a rectifier(220) for impressing power supply to the jigs; a pump(260) for transferring the electrolyte of the electrolytic cell to the jigs; a manifold(240) for constantly distributing the electrolyte transferred from the pump to a plurality of the jigs through a plurality of valves; a manometer(242) for detecting pressure of the electrolyte; a flow meter(244) for detecting flow rate of the electrolyte; a temperature sensor(248) for measuring temperature of the electrolyte; a flow rate control valve(246) for controlling a supply quantity of the electrolyte; and a control box(210) for controlling supply power of the rectifier and controlling temperature of the electrolyte in the electrolytic cell and controlling the flow rate control valve based on detected signals impressed from the manometer, flow meter and temperature sensor.
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