| 摘要 |
PURPOSE: To cancel a moment reaction force caused by a drive of an object, or to reduce the influences thereof. CONSTITUTION: A driver comprises a first linear motor for driving an object(XY slider, etc.), in an X direction, a second linear motor for driving the object in a Y direction, and a controller for controlling the first and second linear moors. First and second actuators have first and second reaction force counters which move by receiving a reaction force caused when driving the object, respectively. A control part controls the first and second linear motors so as to move the object in a straight line connecting point A with point B when the object stationary at the point A is moved and stopped at point B.
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