| 摘要 |
PURPOSE: To always use a laser light source while an output performance is satisfactory. CONSTITUTION: As for the oscillation frequency of a laser light source in a predetermined range including available oscillation frequency, information under the consideration of the output performance of the laser light source and information indicating a relation between the oscillation frequency and the output performance is acquired, and the information is stored in a memory. Then, when controlling the laser light source, a specific frequency area where the output performance of the laser light source is deteriorated or made satisfactory is specified based on the information stored in the memory, and whether or not an oscillation frequency f to be used is within the specific frequency area is determined (step 156 or 166), and the frequency area where the output performance is deteriorated is prevented, or oscillation frequency is set in the frequency area in which the output performance is made satisfactory in accordance with the result (step 158 or 164). Thus, it is possible to always use the laser light source while the output performance is satisfactory.
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