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发明名称
INJECTION SEEDED F2 LASER WITH LINE SELECTION AND DISCRIMINATION
摘要
申请公布号
EP1378037(A1)
申请公布日期
2004.01.07
申请号
EP20020756431
申请日期
2002.04.03
申请人
CYMER, INC.
发明人
ONKELS, ECKEHARD, D.;SANDSTROM, RICHARD, L.;NESS, RICHARD, M.;PARTLO, WILLIAM, N.;ERSHOV, ALEXANDER, I.;OH, CHOONGHOON
分类号
H01L21/027;H01S3/10;G03F7/20;H01S3/03;H01S3/036;H01S3/038;H01S3/041;H01S3/08;H01S3/0943;H01S3/097;H01S3/0971;H01S3/0975;H01S3/102;H01S3/134;H01S3/137;H01S3/139;H01S3/22;H01S3/223;H01S3/225;H01S3/23;(IPC1-7):H01S3/10;H01S3/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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