发明名称 |
Semiconductor structure having elevated salicided source/drain regions and metal gate electrode on nitride/oxide dielectric |
摘要 |
A semiconductor structure and a process for its manufacture. First and second gate dielectric layers are formed on a semiconductor substrate between nitride spacers, and a metal gate electrode is formed on the gate dielectric layers. Lightly-doped drain regions and source/drain regions are disposed in the substrate and aligned with the electrode and spacers. A silicide contact layer is disposed over an epitaxial layer on the substrate over the source/drain regions. The metal gate electrode is aligned using a polysilicon alignment structure, which permits high temperature processing before the metal is deposited.
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申请公布号 |
US6674135(B1) |
申请公布日期 |
2004.01.06 |
申请号 |
US19980199666 |
申请日期 |
1998.11.25 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
CHEEK JON;WRISTERS DERICK;GARDNER MARK I. |
分类号 |
H01L21/28;H01L21/336;H01L29/417;H01L29/51;(IPC1-7):H01L29/76 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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