| 发明名称 |
Illumination optical system in exposure apparatus |
| 摘要 |
An optical system includes an internal reflection type optical member for changing a direction of advancement of an approximately linearly polarized light on the basis of total reflection and a depolarizing member for dissolving linear polarization of light emitted from the optical member.
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| 申请公布号 |
US6674514(B2) |
申请公布日期 |
2004.01.06 |
| 申请号 |
US20010809056 |
申请日期 |
2001.03.16 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SHINODA KEN-ICHIRO |
| 分类号 |
G02B5/30;G02B17/04;G02B17/08;G02B27/00;G02B27/28;G03F7/20;H01L21/027;(IPC1-7):G03B27/72;G03B27/42;G03B27/28 |
主分类号 |
G02B5/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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