| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a large flexure displacement by forming a common electrode on one side of a resiliently deformable plate of piezoelectric material provided with bends at a constant pitch and forming an individual electrode selectively at the bend. SOLUTION: Curved parts 2, 2, 2 shaped like ship's bottom in the longitudinal direction are formed, at a predetermined pitch, on a resilient plate 1 of about 7μm thick made of a piezoelectric material, e.g. PZT. The resilient plate 1 is provided, on one side thereof, with a common electrode 3 and, on the other side thereof, with individual electrodes 4 independently at deforming regions, i.e., the curved parts 2. When a driving voltage is applied between two electrodes 3, 4, the resilient plate 1 is contracted only at the region sandwiched by the electrodes 3, 4. Consequently, the resilient plate 1 is displaced outward and the curved part 2 becomes shallower byΔH. When the electrodes 3, 4 are discharged under that state, the resilient plate 1 is reset. A maximum flexure can be attained by applying a drive signal selectively to the common electrode 3 and the individual electrode 4 in a region to be flexed.</p> |
