发明名称 Tuning method for a processing machine
摘要 A method for setting at least one selected parameter of a processing tool. The processing tool is utilized for processing articles in a production line. Initially, the selected parameter is set to an initial value and one such article is positioned for processing. The article is sequentially processed by the processing tool a certain number of times and corresponding processed data are obtained. The processed data are analyzed so as to determine whether or not the processed data satisfy predetermined result criteria. Upon detecting that the processed data do not satisfy the result criteria, the selected parameter is changed to a tuned value and the processing, obtaining the processed data and analyzing thereof, are repeated as many times as required until the result criteria is satisfied.
申请公布号 US6674888(B1) 申请公布日期 2004.01.06
申请号 US19980032117 申请日期 1998.02.27
申请人 APPLIED MATERIALS, INC. 发明人 DUZY EYAL
分类号 G01N21/956;H01L21/66;(IPC1-7):G06K9/00 主分类号 G01N21/956
代理机构 代理人
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