发明名称 |
HEAT SHIELD ASSEMBLY FOR CRYSTAL PULLER |
摘要 |
A heat shield assembly for use in a crystal puller has an outer reflector interposed between the ingot and the crucible as the ingot is pulled from the molten source material. A cooling shield is interposed between the ingot and the outer reflector whereby the cooling shield is exposed to heat radiated from the ingot for increasing the rate at which the ingot is cooled, thereby increasing the axial temperature gradient of the ingot. In a further embodiment, an inner shield panel is disposed generally intermediate the cooling shield and the ingot in radially spaced relationship with the cooling shield and is constructed of a material substantially transparent to radiant heat from the ingot. |
申请公布号 |
EP1373603(A1) |
申请公布日期 |
2004.01.02 |
申请号 |
EP20020753793 |
申请日期 |
2002.03.19 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
FERRY, LEE, W.;SCHRENKER, RICHARD, A.;BANAN, MOHSEN |
分类号 |
C30B15/00;C30B15/14;C30B29/06;(IPC1-7):C30B15/14 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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