发明名称 MANUFACTURING SYSTEM AND METHOD FOR PROCESSING MATERIALS
摘要 <p>A manufacturing system comprises materials (110, 120) to be processed, and processing tools (130, 140, 150) for processing said materials (110, 120). To each of said materials (110, 120) there are assigned means (111, 121) for directly exchanging information with said processing tools (130, 140, 150) and for deciding on the basis of said directly exchanged inormation which of said processing tools (130, 140, 150) is supposed to process a respective material (110, 120).</p>
申请公布号 EP1373996(A2) 申请公布日期 2004.01.02
申请号 EP20010983588 申请日期 2001.11.19
申请人 MOTOROLA, INC.;ZEAKES, JEASON 发明人 ZEAKES, JASON
分类号 G05B19/418;G05B19/12;H01L21/02;H01L21/677;H01L21/68;(IPC1-7):G05B19/418 主分类号 G05B19/418
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