AIR FEED SYSTEM, AIR DEZYMOTIZING METHOD, AND SYSTEM AND METHOD FOR TRANSFER

摘要

In an air supplying system (1), a filter (6) for removing dust particles from air is provided at some point in an air supply duct (4) that connects an air supplying section (2) to a specific area (C) . A sterilizing section (10) including an electron beam irradiation unit (11) is provided between the air supplying section (2) and the filter (6) . In an air sterilizing method of the present invention, dust particles in the air are removed by the filter (6) at some point in the air supply duct (4) which connects the air supplying section (2) to the specific area (C), and electron beams are irradiated to the air passing through the air supply duct (4) between the air supplying section (2) and the filter (6). <IMAGE>