TITANIUM ALLOY VACUUM CONTAINER AND VACUUM PART

摘要

The objective of the present invention is to provide a titanium alloy vacuum container and vacuum parts that can easily achieve an ultra-high vacuum in a short time through vacuum evacuation. The titanium alloy of the titanium alloy vacuum container and vacuum parts has a compact structure composed of fine grains, each having a size of approximately not more than 10 mu m, with a surface that is exposed to at least vacuum being set to have a surface roughness of not more than 50 nm; and in this structure, preferably, the surface roughness thereof may be set to not more than 10 nm, the titanium alloy may have a hardness in a range of not less than 230 Hv to not more than 310 Hv, and the titanium alloy may have a passivity surface film made by a thin titanium oxide layer or nitride layer that is formed on the surface thereof. The titanium alloy, which is desirably used in such titanium alloy vacuum container and vacuum parts, contains 0.3 wt% to 0.5 wt% of iron and 0.3 wt% to 0.5 wt% of oxygen, and the remainder thereof is made from Ti obligatory impurities.