发明名称 METHOD FOR EVALUATING LAYERS OF IMAGES
摘要 The invention is directed to a method for evaluating layer images (A, B, C, D, E) which are recorded by microscope from planes of different depths in focusing direction z of an object. Every layer image (A, B, C, D, E) is composed of a plurality of image points (Aij, Bij, Cij, Dij, Eij); an intensity value is determined for every image point (Aij, Bij, Cij, Dij, Eij) or for image areas comprising a plurality of these image points (Aij, Bij, Cij, Dij, Eij); the intensity values for image points (Aij, Bij, Cij, Dij, Eij) or image areas lying one above the other in z-direction are combined; a parameter characteristic of these image points (Aij, Bij, Cij, Dij, Eij) or image areas is determined and ordered within a grid corresponding to the grid of the image points (Aij, Bij, Cij, Dij, Eij). In this way, information about the topography of the object, for example, can be obtained and displayed.
申请公布号 EP1373960(A1) 申请公布日期 2004.01.02
申请号 EP20020722224 申请日期 2002.03.15
申请人 CARL ZEISS MICROELECTRONIC SYSTEMS GMBH 发明人 ENGEL, THOMAS;HERBIG, VOLKER
分类号 G01N21/17;G02B21/00;G02B21/36 主分类号 G01N21/17
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