| 摘要 |
<p>There is provided a piezoelectric/electrostrictive film device having larger resonant frequency while having flexural displacement that is equal to or superior to that of conventional piezoelectric/electrostrictive film device, and being excellent in rapid response. The piezoelectric/electrostrictive film device comprises a substrate (44) comprising ceramics, and a piezoelectric/electrostrictive actuator including a lower electrode (77), a piezoelectric/electrostrictive layer (73) and an upper electrode (75) that are sequentially layered on the substrate, the piezoelectric/electrostrictive layer covering an upper surface of the lower electrode and a lower surface of the upper electrode and protruding over edges thereof, wherein the protruded portion (79) of the piezoelectric/electrostrictive layer is coupled to the substrate via a coupling member (70). The present device shows substantially the same flexural displacement, but a larger resonant frequency of 3% or more, when compared with those of a piezoelectric/electrostrictive film device comprising same materials and same configuration as the present device, but without coupling member.</p> |
