摘要 |
An inductance device in monolithic structure is formed from a first metallization level layer of lower parallel conductive lines extending along the inductance pattern; next, on a second level, a set of vias is formed over each underlying conductive line being associated with at least two vias; and in a third metallization level, upper conductive lines interconnected to the underlying conductive lines by means of vias, the lower and upper conductive lines being shifted with respect to one another to ensure the electric continuity. |