发明名称 ELECTRONIC DISPLAY DEVICE AND CLEANING AND ETCHING COMPOSITION FOR SUBSTRATE
摘要 PURPOSE: An electronic display device and a cleaning and etching composition are provided to achieve uniform reproductivity and improved surface roughness by using a composition with fluoride salt and persulfate. CONSTITUTION: An etching composition comprises fluoride salt 0.1 to 50 weight percent selected from a group consisting of acid ammonium fluoride(NH4HF2), ammonium fluoride(NH4F), sodium(natrium) fluoride(NaF), acid potassium(kalium) fluoride(KHF2), acid sodium(natrium) fluoride(NaHF2), barium fluoride(BaF2), kalium fluoride(KF), and ammonium fluoroborate(NH4BF4); persulfate 0.1 to 50 weight percent selected from a group consisting of sodium persulfate(Na2S208), ammonium persulfate((NH4)2S208), and kalium persulfate(K2S208); and purified water 0 to 99.28 weight percent.
申请公布号 KR100415261(B1) 申请公布日期 2004.01.02
申请号 KR19980010415 申请日期 1998.03.26
申请人 LEE, GI WON 发明人 LEE, GI WON
分类号 H01J9/38;(IPC1-7):H01J9/38 主分类号 H01J9/38
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