发明名称 Semiconductor substrate and process for its production
摘要 The present invention provides a semiconductor substrate comprising a semiconductor layer 3 formed on a supporting substrate 1 with interposition of an insulating layer 2 therebetween, wherein a mark 4 is formed in a region other than a surface region of the semiconductor layer 3; and a process for producing the semiconductor substrate. <IMAGE>
申请公布号 EP1115153(A3) 申请公布日期 2004.01.02
申请号 EP20000311789 申请日期 2000.12.29
申请人 CANON KABUSHIKI KAISHA 发明人 SAKAGUCHI, KIYOFUMI
分类号 H01L21/20;H01L23/544 主分类号 H01L21/20
代理机构 代理人
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