METHOD OF PLASMA ETCHING ORGANIC ANTIREFLECTIVE COATING,申请号EP20020717545-传众专利搜索

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发明名称	METHOD OF PLASMA ETCHING ORGANIC ANTIREFLECTIVE COATING
摘要
申请公布号	EP1374288(A2)	申请公布日期	2004.01.02
申请号	EP20020717545	申请日期	2002.03.21
申请人	LAM RESEARCH CORPORATION	发明人	NI, TUQIANG;JIANG, WEINAN;CHIANG, CONAN;LIN, FRANK, Y.;LEE, CHRIS;LEE, DAI, N.
分类号	H01L21/28;H01L21/311;B81C1/00;H01L21/00;H01L21/3065;H01L21/3213;H01L21/768;(IPC1-7):H01L21/027	主分类号	H01L21/28
代理机构		代理人
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