发明名称 |
MICRO ELECTROMECHANICAL SWITCHES |
摘要 |
A micro electromechanical switch structure includes a beam that is continuously controllable by adding an actuation electrode proximate to, but outside a beam projection. The beam projection is onto and perpendicular to a plane of the actuation electrode. By placing an actuation electrode beside a beam instead of underneath the beam, the actuation electrode can continuously control the movement of the beam from a rest position to a complete actuation. |
申请公布号 |
EP1373126(A1) |
申请公布日期 |
2004.01.02 |
申请号 |
EP20020707382 |
申请日期 |
2002.03.20 |
申请人 |
TELEFONAKTIEBOLAGET L M ERICSSON (PUBL) |
发明人 |
HALLBJOERNER, PAUL |
分类号 |
B81B3/00;H01H59/00;(IPC1-7):B81B3/00;H01L29/93;H01G5/00;H01H1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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