发明名称 |
ARRAY FOR REDUCING THE COHERENCE OF A COHERENT RADIATION BEAM |
摘要 |
The invention relates to an array for reducing the coherence of a coherent radiation beam (6), wherein a reflector (1) defining an inner space is provided with a diffusely reflecting inner surface (4), wherein said reflector (1) has an inlet hole (2) through which the radiation beam (6) can be injected into the inner space, in addition to an outlet hole (3) through which the rays of the radiation beam (6) can come out after at least one reflection on the inner surface (4). |
申请公布号 |
EP1373969(A1) |
申请公布日期 |
2004.01.02 |
申请号 |
EP20020767491 |
申请日期 |
2002.09.18 |
申请人 |
CARL ZEISS MICROELECTRONIC SYSTEMS GMBH |
发明人 |
BURKHARDT, MATTHIAS;MENCK, ALEXANDER;BISCHOFF, JOERG;STEINER, REINHARD;ERDMANN, LARS |
分类号 |
G02B5/02;G02B5/10;G02B27/48 |
主分类号 |
G02B5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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