| 摘要 |
<p>The present invention discloses a microinjector having drive circuit and method for making the same. The microinjector utilizes bubble as virtual valve to eject fluid medium, including manifold, multiple fluid chambers, multiple pairs of the first bubble generating member and the second bubble generating member, multiple nozzles and drive circuit, wherein, the drive circuit controls multiple pairs of the first bubble generating member and the second bubble generating member simultaneously to eject the fluid which in the corresponding fluid chamber from the corresponding nozzle, thereby attaining the effect for ejecting fluid; in addition, due to integrating the drive circuit with the bubble generating members in the same substrate, not only reduced the number of making steps, but also obtained the structure of less number of circuit unit and interconnecting lines. <IMAGE></p> |
