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发明名称
Diffractive optical element and optical assembly using a diffractive optical element
摘要
申请公布号
EP1256821(A3)
申请公布日期
2004.01.02
申请号
EP20020004081
申请日期
2002.02.25
申请人
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
发明人
KLEEMANN, BERND;ROSTALSKI, HANS-JUERGEN;ULRICH, WILLI
分类号
G02B27/44;G02B5/18;(IPC1-7):G02B5/18
主分类号
G02B27/44
代理机构
代理人
主权项
地址
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