STRUCTURE AND METHOD FOR DETERMINING EDGES OF REGIONS IN A SEMICONDUCTOR WAFER,申请号EP20020717776-传众专利搜索

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发明名称	STRUCTURE AND METHOD FOR DETERMINING EDGES OF REGIONS IN A SEMICONDUCTOR WAFER
摘要
申请公布号	EP1374299(A2)	申请公布日期	2004.01.02
申请号	EP20020717776	申请日期	2002.04.05
申请人	INFINEON TECHNOLOGIES AG	发明人	SCHAFBAUER, THOMAS;VON EHRENWALL, ANDREAS;MONO, TOBIAS
分类号	H01L23/544;(IPC1-7):H01L21/66;G03F7/20	主分类号	H01L23/544
代理机构		代理人
主权项
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