发明名称 Carrying vehicle, manufacturing apparatus, and carrying system
摘要 According to the present invention, in a carrying system comprising a carrying vehicle and a manufacturing apparatus the interior of which is kept cleaner than a surrounding environment, manufactured articles to be transferred are prevented from being contaminated by foreign matter or the like attached to transfer ports. A carrying vehicle includes a running unit 14 that runs along a predetermined carrying path, a cleaning unit 12 that supplies cleaned air, a housing section 13 to which the cleaned air is supplied and in which manufactured articles are housed, a transfer port 11 which is formed in a side of a housing and through which a manufactured article is loaded into or unloaded from the housing section 13, and an air injecting section 19A that blows out air toward the transfer port 11.
申请公布号 US2004000129(A1) 申请公布日期 2004.01.01
申请号 US20030462732 申请日期 2003.06.17
申请人 ADVANCED DISPLAY INC.;MURATA KIKAI KABUSHIKI KAISHA 发明人 ISHIHARA HIROYUKI;SHIMIZU TAKAO;NAKAO TAKASHI;TAHARA RYOSUKE;TAKEUCHI HIDETOSHI
分类号 H01L21/68;B01D50/00;H01L21/00;H01L21/677;(IPC1-7):B01D50/00 主分类号 H01L21/68
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