发明名称 |
Carrying vehicle, manufacturing apparatus, and carrying system |
摘要 |
According to the present invention, in a carrying system comprising a carrying vehicle and a manufacturing apparatus the interior of which is kept cleaner than a surrounding environment, manufactured articles to be transferred are prevented from being contaminated by foreign matter or the like attached to transfer ports. A carrying vehicle includes a running unit 14 that runs along a predetermined carrying path, a cleaning unit 12 that supplies cleaned air, a housing section 13 to which the cleaned air is supplied and in which manufactured articles are housed, a transfer port 11 which is formed in a side of a housing and through which a manufactured article is loaded into or unloaded from the housing section 13, and an air injecting section 19A that blows out air toward the transfer port 11.
|
申请公布号 |
US2004000129(A1) |
申请公布日期 |
2004.01.01 |
申请号 |
US20030462732 |
申请日期 |
2003.06.17 |
申请人 |
ADVANCED DISPLAY INC.;MURATA KIKAI KABUSHIKI KAISHA |
发明人 |
ISHIHARA HIROYUKI;SHIMIZU TAKAO;NAKAO TAKASHI;TAHARA RYOSUKE;TAKEUCHI HIDETOSHI |
分类号 |
H01L21/68;B01D50/00;H01L21/00;H01L21/677;(IPC1-7):B01D50/00 |
主分类号 |
H01L21/68 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|