发明名称 Method for manufacturing semiconductor device
摘要 A method is provided for manufacturing a semiconductor device having a high breakdown voltage transistor and a low breakdown voltage transistor with different driving voltages provided in a common layer. The method includes: (a) implanting an impurity of a second conductivity type in a specified region of a semiconductor layer of a first conductivity type to form a first well; (b) implanting an impurity of the second conductivity type in a specified region of the semiconductor layer to form a second well having an impurity concentration different from the first well; and (c) implanting an impurity of the first conductivity type in a specified region of the first well to form a third well.
申请公布号 US2004002201(A1) 申请公布日期 2004.01.01
申请号 US20030394448 申请日期 2003.03.21
申请人 HAYASHI MASAHIRO 发明人 HAYASHI MASAHIRO
分类号 H01L21/761;C30B1/00;H01L21/20;H01L21/425;H01L21/82;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;(IPC1-7):C30B1/00 主分类号 H01L21/761
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