发明名称 |
Sample inclination measuring method |
摘要 |
A sample inclination measuring method rotates, by a predetermined angle with respect to an interferometer apparatus, a columnar member having a leading end face in a planar form while the columnar member is held by a clamping apparatus, detects a relative angle between a reference surface of the interferometer apparatus and the leading end face at each of two rotational positions, and measures the inclination of the axis of the columnar member by using a predetermined arithmetic expression according to thus detected two angles.
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申请公布号 |
US2004001205(A1) |
申请公布日期 |
2004.01.01 |
申请号 |
US20030465623 |
申请日期 |
2003.06.20 |
申请人 |
FUJI PHOTO OPTICAL CO., LTD. |
发明人 |
GE ZONGTAO;KOBAYASHI FUMIO;TANAKA KUNIHIKO |
分类号 |
G01B9/02;G01B11/26;G02B6/36;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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