摘要 |
A micropump comprising a pump body including a fluid inlet channel, a fluid outlet channel and pumping reservoir, the fluid inlet channel and the fluid outlet channel communicating with the pumping reservoir, a diaphragm covering the pumping reservoir, a piezoelectric strip actuator attached to the diaphragm such that by applying a voltage to the actuator, the diaphragm can be raised or lowered relative to the pumping chamber, a valve on the inlet channel and the outlet channel, the valve opening and closing the inlet and the outlet channel in response to the raising and lowering of the diaphragm.
|