发明名称 Methods in electroanalytical techniques to analyze organic components in plating baths
摘要 Embodiments of the invention provide an electro-analytical method for determining the concentration of an organic additive in an acidic or basic metal plating bath using an organic chemical analyzer. The method includes preparing a supporting-electrolyte solution, preparing a testing solution including the supporting-electrolyte solution and a standard solution, measuring an electrochemical response of the supporting-electrolyte solution using the organic chemical analyzer, and implementing an electro-analytical technique to determine the concentration of the organic additive in the plating bath from the electrochemical response measurements. The method is performed for independently analyzing one organic additive component in a plating bath containing multi-component organic additives, regardless of knowledge of the concentration of other organic additives and with minimal interference among organic additives.
申请公布号 US2004000484(A1) 申请公布日期 2004.01.01
申请号 US20020187734 申请日期 2002.06.27
申请人 APPLIED MATERIALS, INC. 发明人 SUN ZHI-WEN;YU CHUNMAN;METZGER BRIAN;NGUYEN DAVID W.;DIXIT GIRISH
分类号 C25D21/12;G01N27/42;G01N27/49;G01N31/16;(IPC1-7):C25D5/00 主分类号 C25D21/12
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