| 摘要 |
PURPOSE: A jig for connection of an applicator is provided to be capable of easily loading the applicator to a plasma chamber, and stably transmitting the RF(Radio Frequency) power generated from a generator to the applicator for improving the process efficiency of the plasma chamber and the productivity and quality of products. CONSTITUTION: A jig(70) for connection of an applicator is provided with a vertical wall part(71) attached on one side of a plasma chamber and a bottom surface part(73) loaded to the bottom surface of the plasma chamber. At this time, the vertical wall part includes an insertion hole(72) having the same size as a predetermined panel connected to the peripheral portion of a through hole of the plasma chamber. Preferably, the insertion hole has a slightly larger size than that of the predetermined panel.
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