| 摘要 |
PURPOSE: An improved tube structure in a bake oven is provided to be capable of securing the uniform temperature distribution of the inner portion of a chamber for smoothly carrying out a polyimide bake process. CONSTITUTION: A tube(21) is used for supplying gas to a bake oven. At this time, the bake oven is used for carrying out a baking process at a semiconductor process object. At the time, the tube includes a plurality of holes(23), wherein the hole has a diameter of 1.8-2.2 mm and an interval between holes, of 27-38 mm. Preferably, the tube has a length of 950 mm, and the hole has the interval between holes, of 35mm and the diameter of 2.0 mm. At this time, the number of holes, is 18. Preferably, the hole is formed at a predetermined portion apart from a gas inlet port as much as 290-300 mm and a closed end portion as much as 20-30 mm.
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