Optical metrology of single features,申请号AU20030248651-传众专利搜索

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发明名称	Optical metrology of single features
摘要
申请公布号	AU2003248651(A8)	申请公布日期	2003.12.31
申请号	AU20030248651	申请日期	2003.06.09
申请人	TIMBRE TECHNOLOGIES, INC.	发明人	JOERG BISCHOFF;JUNWEI BAO;XINHUI NIU
分类号	G01B11/24;G01N21/47;H01L21/027;(IPC1-7):G01B11/00	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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