| 摘要 |
The aim of the invention is to avoid, during the batch handling of wafers, the negative effects caused by missing wafers in a wafer stack. To this end a device for handling a wafer stack and making said stack available to a treatment process is provided for which comprises a receiving device fitted with retaining elements for the simultaneous arrangement of several wafers positioned at defined distances from and vertically in relation to each other. Said device also comprises a detection device which is able to detect whether at least one wafer is missing in a wafer stack (4), as well as a handling device (20) which can be displaced in relation to the receiving device. Said device serves to remove at least one substantially vertically oriented fill-in wafer (26) from a storage means in which several fill-in wafers (26) can be positioned and to insert the fill-in wafer (26) into the wafer stack (4) in a defined position in said stack. |
