CHECK VALVE FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: A check valve for fabricating a semiconductor is provided to prevent a chamber contamination caused by the particles that could be transferred from a vacuum pump to the chamber with a plate that can seal a chamber port by the elastic force of a spring when the vacuum pump malfunctions. CONSTITUTION: The first port is coupled to the chamber. The second port is coupled to a pump for maintaining the vacuum of the chamber. A housing includes the first and second ports. The plate(30) opens and closes the first port. One end of an elastic member is coupled to the plate. The plate is closely attached to the first port by the elastic force of an elastic member and is separated from the first port when the pump operates.