发明名称 |
IDENTIFYING DEFECTS IN A CONDUCTIVE STRUCTURE OF A WAFER, BASED ON HEAT TRANSFER THERETHROUGH |
摘要 |
Heat is applied to a conductive structure (200) by a laser beam (251), another laser beam (250), and the temperature at or near the point of heat application is measured. The measured temperature indicates the integrity or the defectiveness of various features in the conductive structure, near the point of heat application. |
申请公布号 |
WO03075322(A3) |
申请公布日期 |
2003.12.31 |
申请号 |
WO2003US06250 |
申请日期 |
2003.02.28 |
申请人 |
BOXER CROSS, INC. |
发明人 |
BORDEN, PETER, G.;LI, JIPING |
分类号 |
G01N25/72;H01L23/544 |
主分类号 |
G01N25/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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