| 发明名称 |
CLEANING SHEET, CLEANING-FUNCTIONAL CARRIER MEMBER, AND METHOD FOR CLEANING SUBSTRATE PROCESSORS COMPRISING THEM |
| 摘要 |
A cleaning sheet for foreign-substance-disliking substrate processors such as apparatuses for manufacturing and inspecting semiconductors, flat panel displays, and print substrates, a cleaning-functional carrier member, and a cleaning method. The cleaning sheet is provided with a porous layer as the cleaning layer or an adhesive layer on one face of a sheetlike material provided with a porous layer. |
| 申请公布号 |
WO2004000474(A1) |
申请公布日期 |
2003.12.31 |
| 申请号 |
WO2002JP06118 |
申请日期 |
2002.06.19 |
| 申请人 |
NITTO DENKO CORPORATION;NAMIKAWA, MAKOTO;TERADA, YOSHIO;NUKAGA, JIROU |
发明人 |
NAMIKAWA, MAKOTO;TERADA, YOSHIO;NUKAGA, JIROU |
| 分类号 |
B08B1/00;C09J7/02;C09J201/00;H01L21/00;H01L21/02;H01L21/027;H01L21/304;H01L21/677;H01L21/68 |
主分类号 |
B08B1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
