| 摘要 |
PURPOSE: A cassette loader apparatus of semiconductor device manufacturing equipment is provided to be capable of reducing the loss of working time and improving the productivity of the semiconductor device manufacturing equipment. CONSTITUTION: A cassette loader apparatus of a semiconductor device manufacturing equipment is provided with a fixing plate(22) spaced apart from the upper surface of a supply plate(18) for loading a cassette, a pair of sensing parts(26a,26b) for detecting whether a wafer is protruded from the cassette, or not, an eccentric shaft(30) installed parallel with the arrangement direction of a plurality of wafers stored at the cassette for pushing a deviated wafer to the cassette by using a moving part, and a controller for controlling the moving part by receiving a detecting signal generated from the sensing parts.
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