| 摘要 |
PURPOSE: A stepper equipment and a method for detecting and transferring wafer are provided to be capable of reducing fabrication loss time by preventing a phenomenon that a wafer located at the upper portion of a pre-align unit and a discharge unit is not detected. CONSTITUTION: A stepper equipment is provided with a pre-align unit(100), a discharge unit(200), and a transfer unit(300) for transferring a wafer to the stepper equipment. At this time, the pre-align unit includes an align rotary part for rotating the wafer, an align center position correcting part for exactly locating the wafer at the predetermined center portion, the first motor for driving the align rotary part, the first vacuum hose, and the first detecting part for sensing the wafer located at the align rotary part. At the time, the discharge unit includes a discharge rotary part, a discharge center position correcting part, the second motor for driving the discharge rotary part, the second vacuum hose, and the second detecting part.
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